F07400 - SEMI F74 - Test Method for the Performance and Evaluation of Metal Seal Designs for Use in Gas Delivery Systems Revision:SEMI F74-1103 - Superseded The intent of this Standard

The intent of this Standard is to facilitate the integration of IBSEM equipment into an automated (e

1-0304 (technical revision)

SEMI G86-0217 (technical revision)

• Equipment recipe components and recipe steps contained in the recipe components as they apply to process modules

the test methods are to be applied to the assembled and interconnected gas delivery components and their associated mounting panel (backplane)

F07400 - SEMI F74 - Test Method for the Performance and Evaluation of Metal Seal Designs for Use in Gas Delivery Systems Revision:SEMI F74-1103 - Superseded The intent of this StandardThis document is a test method for evaluating metal seal designs use in gas delivery systems. It covers both surface mounted gas systems and conventional metal face seal fitting systems. Referenced SEMI Standards SEMI E49 Guide for High Purity and Ultrahigh Purity Piping Performance Subassemblies, and Final Assemblies SEMI F1 Specification for Leak Integrity of High Purity Gas Piping Systems and Components