E05400 - SEMI E54 - Specification for Sensor/Actuator Network volume-C The purpose of this Document

The purpose of this Document is to define a method for testing filters or gas systems being considered for installation into a high-purity gas distribution system or on semiconductor manufacturing equipment

and dead band of a thermal mass flow controller (MFC)

SEMI E37-0222 (technical revision)

SEMI E74 — Specification for Vacuum Pump Interfaces – Turbomolecular Pumps

This edition was approved for publication by the global Audits and Reviews Subcommittee on August 31

E05400 - SEMI E54 - Specification for Sensor/Actuator Network volume-C The purpose of this DocumentThis Specification provides the structure of SEMIs Sensor Actuator Network (SAN) Standard. It provides the definition for interoperability with respect to SEMI SAN Standard compliant Sensor Actuator devices. This Standard specifies how devices interoperate on a network as part of the control system for equipment. This Specification, which is the root of the SAN Standard, defines the relationships of each of the other Specifications that are components