P03700 - SEMI P37 - Specification for Extreme Ultraviolet Lithography Substrates and Blanks StdTpc-300 mm Carriers & Physical Interfaces terms used to describe the

terms used to describe the characteristics of the edge profile of silicon wafers are named and their meaning is illustrated by a schematic drawing

within the limits of the measurement equipment precision

SEMI E70-0298 (first published)

コスト，納期，および信頼性を最適化するために，適切なセキュリティ対策を装置に適用するガイドラインを提供する。

All parts of the tube fittings tested by this method in contact with the internal fluid are made of fluorocarbon materials

P03700 - SEMI P37 - Specification for Extreme Ultraviolet Lithography Substrates and Blanks StdTpc-300 mm Carriers & Physical Interfaces terms used to describe theThis Standard was technically approved by the Micropatterning Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 1, 2013. Available at www. semiviews. org and www. semi. org in June 2013; originally published November 2001; previously published November 2009. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not