M02600 - SEMI M26 - Guide for the Re-Use of 100, 125, 150, and 200 mm Wafer Shipping Boxes Used to Transport Wafers StdPbc-0418 This Document adapts structure and

This Document adapts structure and wording from other SEMI Documents

It provides the functionality required for process management for modules within a cluster tool

orgで入手可能となる。初版は1995年2月発行，前版は2004年3月発行。

are now widely used for epitaxial layer thickness measurements

GEMスタンダードでは次のことを明確にしたいと考えている：

M02600 - SEMI M26 - Guide for the Re-Use of 100, 125, 150, and 200 mm Wafer Shipping Boxes Used to Transport Wafers StdPbc-0418 This Document adapts structure andThis guide was technically approved by the global Silicon Wafer Committee and is the direct responsibility of the Japanese Silicon Wafer Committee. Current edition approved by the Japanese Regional Standards Committee on January 9, 2004. Initially available at www. semi. org February 2004; to be March 2004. Originally published in 1995; last published in 1996. This document is a guide for box cleaning services, wafer suppliers, and wafer users for the