G09400 - SEMI G94 - Specification for Coin-Stack Type Tape Frame Shipping Container for 300 mm Wafer Revision:SEMI G94-0113 (Reapproved 1123) - Current 4 — 200 mm Standard

4 — 200 mm Standard Mechanical Interface (SMIF)

SEMI MF1527 — Guide for Application of Silicon Standard Reference Materials and Reference Wafers for Calibration and Control of Instruments for Measuring Resistivity of Silicon

SEMI HB10-1018 (first published)

orgで，そして2006年3月にCD-ROMで入手可能となる。初版は2005年1月発行，前版は2005年3月に発行された。

help in equipment selection

G09400 - SEMI G94 - Specification for Coin-Stack Type Tape Frame Shipping Container for 300 mm Wafer Revision:SEMI G94-0113 (Reapproved 1123) - Current 4 — 200 mm StandardThis Specification defines the dimensions of container and requirements for securing the interface between container and processing equipment or wafer transportation equipment. This Standard specifies the requirements for wafer spacers used for separation of wafers and for a cushion material used for wafer protection. This Standard specifies the electrical characteristics and requirements for hazardous substance for the material of container. The