C02500 - SEMI C25 - Specification for Dichloromethane (Methylene Chloride) StdDcs-Inactive orgで入手可能となる。初版は1990年発行，前版は2004年7月発行。

orgで入手可能となる。初版は1990年発行，前版は2004年7月発行。

determined by doping with carbon

SEMI E154 — Mechanical Interface Specification for 450mm Load Port

This test method may provide guidelines for the application of other techniques with similar detection limits and response time to APIMS which may not be commercially available at this time

and specifying that the equipment shall allow individual actuation of each of these parameters using SEMI standard methods

C02500 - SEMI C25 - Specification for Dichloromethane (Methylene Chloride) StdDcs-Inactive orgで入手可能となる。初版は1990年発行，前版は2004年7月発行。This standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on November 29, 2005. It was available at www. semi. org in February 2006. Originally published 1978; previously published June 1999. NOTICE: This document was completely rewritten in 2006. The purpose of this document is to standardize requirements for dichloromethane (methylene