E17100 - SEMI E171 - Specification for Predictive Carrier Logistics (PCL) Revision:SEMI E171-0524 - Current The common components are used
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Description
The common components are used in association with other XML documents or schemas generated as part of the XML based SEMI Standard Interface Specifications
2 The GEM Standard is intended to specify the following:
SEMI MF657 — Test Method for Measuring Warp and Total Thickness Variation on Silicon Slices and Wafers by a Noncontact Scanning Method
They can be added according to customers’ demands or manufacturing problems
the 1/e lifetime (τe) and/or the primary mode lifetime (τ1)
E17100 - SEMI E171 - Specification for Predictive Carrier Logistics (PCL) Revision:SEMI E171-0524 - Current The common components are usedThe purpose of this Standard is to provide a communication scheme for exchanges of carrier logistics related information, especially predictive information, between equipment and the factory system in order to support seamless cascading of carriers for continuous processing of equipment in semiconductor fabrication systems or similar ones. The purpose of this Standard is to provide models which represent carrier logistics management status in
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