F04700 - SEMI F47 - Specification for Semiconductor Processing Equipment Voltage Sag Immunity StdTpc-Flat Panel Display Reactive gases shall not be

Reactive gases shall not be used as they may react chemically with moisture

support equipment

Specification of data variables required to communicate basic equipment performance data to the host computer

Figures 1 and 2 show examples of types of AMHS equipment

• Carrier transfers to/from production equipment internal buffer space

F04700 - SEMI F47 - Specification for Semiconductor Processing Equipment Voltage Sag Immunity StdTpc-Flat Panel Display Reactive gases shall not beSemiconductor factories require high levels of power quality due to the sensitivity of equipment and process controls. Semiconductor processing equipment is especially vulnerable to voltage sags. This Specification defines the voltage sag immunity required for semiconductor processing, metrology, and automated test equipment. This Specification strikes a balance between voltage sag immunity and increased equipment cost. This Specification sets minimum